IF-12 FOUP/FOSB CLEANING SYSTEM » Chip Hua Equipment & Tools Pte Ltd
IF-12 FOUP/FOSB CLEANING SYSTEM
Product Description:

OVERVIEW

Cleaning FOUPs and FOSBs is required to improve and maintain the yield of the semiconductor manufacturing process. The IF-12 can wash and dry a variety of FOUPs and FOSBs in one system without changing the set-up because of our unique chamber structure.

FEATURES

  • High through-put (compared with our previous system)
  • Small foot print design
  • Protection from electrostatic charge
  • Super purity washing by nozzle jet
  • Hot air knife drying method will shorten drying time efficiently
  • Automatic FOUP Opener function (option)
  • Complete Drying by reliable and successful “hot air spraying” and “high speed spin”
  • Dust suppression, ESD elimination system equipping with fine filter and Ionizer
  • Securing working space for disassemble & assemble container (no need to arrange clean booth separately)
  • Automatic purging function to prevent growth of bacteria
  • Auto flushing fuction prevents dead water
  • Easy operation by touch panel
  • Ensure High safety with completion of various interlocking system
IF-12-FOUPFOSB-CLEANING-SYSTEM.pdf
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